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UMC
Develops Ultimate Spacer Process to Enhance MOSFET
Device Performance for 65nm and Beyond
HSINCHU, Taiwan, December 7, 2005 -- UMC
(NYSE: UMC, TSE: 2303), a world leading semiconductor foundry, today
announced that its Central Research and Development Division (CRD)
has successfully developed an Ultimate Spacer Process (USP) technology
that simultaneously enhances NMOS and PMOS device performance. Devices
fabricated at UMC using USP exhibited drive current improvements
of 15% for NMOS and 7% for PMOS, while maintaining overall process
simplicity. This accomplishment is instrumental in achieving performance
improvement during increasingly difficult CMOS scaling situations.
"Seeking ways to enhance electron and hole
mobility is a major focus for device development at UMC," said
Dr. Mike Ma, deputy division director of Exploratory Technology
for the Central Research and Development division at UMC. "The
USP technology enables UMC to provide an extra performance improvement
option to complement our other mobility enhancement technologies.
With only one additional process step inserted, USP also delivers
a manufacturability advantage over other strained silicon technologies."
In addition, the performance advantage of USP
can be leveraged with other mobility enhancement techniques; combining
USP with substrate orientation engineering resulted in a 35% PMOS
drive current enhancement. This USP technology has also been successfully
deployed in a customer FPGA product, resulting in a 15% speed improvement
without compromising yield and reliability performance. This confirms
the readiness of applying USP technology for 65nm mass production
and beyond.
UMC will present a detailed report of this technology
at the "2005 IEEE International Electron Devices Meeting"
in Washington, D.C. on December 7.
About UMC
UMC (NYSE: UMC, TSE: 2303) is a leading global semiconductor foundry
that manufactures advanced process ICs for applications spanning
every major sector of the semiconductor industry. UMC delivers cutting-edge
foundry technologies that enable sophisticated system-on-chip (SoC)
designs, including volume production 90nm, industry-leading 65nm,
and mixed signal/RFCMOS. UMC's 10 wafer manufacturing facilities
include two advanced 300mm fabs; Fab 12A in Taiwan and Singapore-based
Fab 12i are both in volume production for a variety of customer
products. The company employs approximately 10,500 people worldwide
and has offices in Taiwan, Japan, Singapore, Europe, and the United
States. UMC can be found on the web at http://www.umc.com.
Contacts:
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UMC
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In the USA
KJ Communications
Eileen Elam
(650) 917-1488
eileen@kjcompr.com
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In Taiwan:
Alex Hinnawi
(886) 2-2700-6999 ext. 6958
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