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UMC Produces Working 45-nanometer ICs
Immersion lithography and 2.5 low-k
used to manufacture functional SRAM chips
HSINCHU, Taiwan, November 20, 2006 -- UMC, a leading global
semiconductor foundry (NYSE: UMC, TSE: 2303), today announced that
it has successfully produced functional 45-nanometer (nm) SRAM chips
that feature an impressive bit cell size of less than 0.25um2.
The ICs, produced using UMC's independently developed logic process,
used sophisticated immersion lithography for its 12 critical layers
and incorporated the latest technology advancements such as ultra
shallow junction, mobility enhancement techniques, and ultra low-k
dielectrics (k=2.5).
Immersion lithography is a resolution enhancement technique that
interposes a liquid medium between the scanner optics and the wafer
surface, replacing the traditional air gap. The optical resolution
is enhanced since the immersion fluid, which has a higher refractive
index than air, allows using lenses with a higher numerical aperture.
The result is more accurate patterns imprinted on the silicon wafer.
Dr. Shih-Wei Sun, executive vice president of UMC's Central R&D
Division and Fab 12A, commented, "This latest achievement demonstrates
that UMC's commitment to process technology leadership is stronger
than ever. The 45nm node is a challenging technology generation
that simultaneously introduces new materials and process modules.
We are excited to be among the first companies in the world to produce
working 45nm silicon, and are encouraged by the successful results
realized for the initial 45nm wafer lots. UMC will continue to build
on its 45nm momentum to enhance yields and prepare the technology
for adoption by our foundry customers."
The 45nm SRAM memory bit-cell and macro circuit require good minimum
supply voltage capability, an area that UMC has been paying special
attention to since the early stages of 45nm process development.
Good minimum supply voltage capability is an important aspect for
45nm due to the demanding power saving requirements of today's advanced
portable electronics. In addition, by using optional circuits built
into the test vehicle, the minimum supply voltage level can be further
improved to achieve excellent power behavior.
Producing working SRAM is a key first-step in demonstrating technology
performance and process reliability prior to engaging customers
for the manufacturing of their 45nm products. UMC's 45nm process
features a 30 percent design rule shrink, 50 percent 6-transistor
SRAM cell size shrink, and a 30 percent device performance gain
over the 65nm technology node, which is in production at UMC for
several customer products. Development for UMC's 45nm process is
taking place at the foundry's 300mm Fab 12A, located in Tainan Science
Park in southern Taiwan.
About UMC
UMC (NYSE: UMC, TSE: 2303) is a leading global semiconductor foundry
that manufactures advanced process ICs for applications spanning
every major sector of the semiconductor industry. UMC delivers cutting-edge
foundry technologies that enable sophisticated system-on-chip (SoC)
designs, including volume production 90nm, industry-leading 65nm,
and mixed signal/RFCMOS. UMC's 10 wafer manufacturing facilities
include two advanced 300mm fabs; Fab 12A in Taiwan and Singapore-based
Fab 12i are both in volume production for a variety of customer
products. The company employs approximately 12,000 people worldwide
and has offices in Taiwan, Japan, Singapore, Europe, and the United
States. UMC can be found on the web at http://www.umc.com.
Note From UMC Concerning Forward-Looking Statements
Some of the statements in the foregoing announcement are forward
looking within the meaning of the U.S. Federal Securities laws,
including statements about future outsourcing, wafer capacity, technologies,
business relationships and market conditions. Investors are cautioned
that actual events and results could differ materially from these
statements as a result of a variety of factors, including conditions
in the overall semiconductor market and economy; acceptance and
demand for products from UMC; and technological and development
risks.
Contacts:
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UMC
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KJ Communications
Eileen Elam
(650) 917-1488
eileen@kjcompr.com
In Taiwan:
UMC
Alex Hinnawi
(886) 2-2700-6999 ext. 6958
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