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UMC to use ASML MaskTools' Scattering-Bar Technology
in Manufacturing World's Largest FPGA
SANTA
CLARA, Calif., August 1, 2000 – ASML MaskTools today announced
that UMC, a leading semiconductor foundry, has licensed ASML MaskTools'
optical extension technology for manufacturing advanced semiconductors
with 150nm design rules. The licensing agreement covers the purchase
of ASML MaskTools' MaskRigger™ software as well as a technology
license for UMC to use ASML MaskTools' patented scattering-bar technology
with any third-party software. The enhanced application meets UMC's
requirements for processing the Xilinx XCV3200ETM, the
world's highest density field programmable gate array (FPGA) semiconductor
chips.
"This
licensing agreement meets UMC's production needs for Xilinx's next-generation
chips that are built on our 150nm copper-interconnect process and
will contain over 200 million transistors and three million system
gates," said Peter Huang, lithography department director at UMC.
"Process latitude increases significantly with the use of ASML MaskTools'
scattering-bar technology, which allows quicker yield maturity of
next-generation process technologies. This superior software and
optical extension technology will be a strong tool for UMC as we
further extend our capabilities in sub-wavelength photolithography
technology."
The
relationship between UMC and ASML MaskTools began 18 months ago,
when ASML MaskTools provided a scattering-bar reticle to demonstrate
its technology's capabilities at 250nm and 180nm design rules. During
the demonstration period, ASML MaskTools and its Taiwanese representative
Grand Technology Inc. provided technical support on all issues and
assisted in qualifying a local Taiwanese photomask shop in manufacturing
scattering-bar masks.
A
key benefit of ASML MaskTools' technology is the larger process
window provided by the scattering bars (subresolution design elements
placed by MaskRigger software) on the photomask. The scattering
bars act as "diffraction matching" elements on standard binary photomasks,
which enable the optimization of the total imaging process without
the use of expensive alternating phase shift masks. Furthermore,
the technology can be implemented on many layers of the manufacturing
flow, not just the gate layer. This results in much tighter critical
dimension control on all layers of circuit designs which are pushed
to the limits of manufacturing. The technology becomes crucial on
the 150nm generation and below, as a way to extend the life of the
installed base of 248nm manufacturing equipment.
"Xilinx
gets significantly more high-speed parts using ASML MaskTools' scattering-bar
technology, adding even greater value to UMC's world class technology
and foundry services," said Daniel Gitlin, senior director of technology
development for Xilinx Advanced Products Group.
"This
software and technology licensing agreement provides UMC with the
flexibility to implement with our own software products or other
advanced EDA software," said Doug Marsh, president of ASML MaskTools.
"Our technology is the most advanced in the industry and we are
proud to be a key enabler of UMC's next-generation manufacturing
technology."
ASML
MaskTools' policy is that each fab that wishes to make and use photomasks
containing ASML MaskTools' scattering-bar IP should obtain a technology
license from ASML MaskTools. The license can be obtained either
by purchasing ASML MaskTools' software, MaskRigger, or by purchasing
an unbundled technology license for use with third-party software,
such as Mentor Graphics'
Calibre software. The scattering-bar technology license is sold
exclusively by ASML MaskTools.
About ASML MaskTools:
ASML MaskTools, Inc.
is an ASML company based in Santa Clara, Calif. The company is focused
on providing an array of optical extension technologies to enhance
photolithography process latitude, thereby improving IC yields in
manufacturing. Optical extension technologies are becoming essential
as optical lithography is continuing to be used for volume IC manufacturing
below the wavelength of the exposure light source. For more information
on ASML MaskTools' products and services, call the company at (408)
855-0500 or visit its website at www.masktools.com . MaskTools and MaskRigger
are trademarks of ASML.
About ASML:
ASML, founded in 1984, is a world leader in advanced lithography
systems that are essential to the fabrication of integrated circuits.
ASML is publicly traded on both the Amsterdam Exchange and on the
Nasdaq Stock Market under the symbol "ASML." Visit the company's
web site at http://www.asml.com for more information.
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