聯華電子今日 (20日) 與半導體設計軟體領導廠商美商新思科技 (Synopsys) 共同宣佈,聯華電子在其 90 奈米製程已採用新思科技的輪替式光圈相位移光罩 (alternating aperture PSM) 技術,以強化可製造性。使用輪替式光圈相位移光罩技術,將可增進微影術的解析度、擴大製程寬容度,以及獲得更優異的效能,以提昇整體可製造性。聯華電子將可提供此輪替式光圈相位移光罩技術給採用 90 奈米製程發展高效能與低耗電 IC 的客戶。 “聯華電子持續發展與採用創新的生產技術,以維持我們在製造效益上的領導者地位,”聯華電子中央研究發展部先進模組副部長黃耀宏表示,“在針對主流 90 奈米製程的輪替式光圈相位移光罩技術發展上,聯華電子與新思科技攜手合作並且欣見雙方的努力得以開花結果。這項成果不僅強化了我們現有的生產技術,同時也展現了此解決方案在未來 90 奈米以下製程世代的發展能力。在目前業界所發展的技術中,例如浸潤式微影術 (immersion lithography),尚未於實際製造環境下驗證,然而輪替式光圈相位移技術已於晶圓廠內通過生產驗證。” 聯華電子與新思科技的工程師共同合作,在採用輪替式光圈相位移光罩製程於 FPGA 晶片上,運用新思科技的 DFM 流程。此流程包含了 Proteus 光學近接修正技術 (OPC) 軟體、新思科技的輪替式光圈相位移光罩技術 (AA-PSM)、SiVLR 微影驗證軟體、Hercules™ 設計規則檢驗 (DRC) 與光罩規則檢驗 (MRC) 工具,以及 CATS® 切割技術 (fracturing) 軟體。新思科技的輪替式光圈相位移技術,是目前唯一獲數家半導體領導廠商用於 IC 製造的商用優勢相位移技術。 “為半導體公司在先進製程節點上提供可促進高良率晶片生產的技術與軟體產品,是新思科技對於客戶一貫的承諾,”新思科技矽工程部門行銷副總鄭介廉表示,“我們非常榮幸能與聯華電子合作,採用新思科技輪替式光圈相位移技術的獨特製造能力,來提昇微影術的解析度。此項合作的成果,再次證明了新思科技在為 90 奈米及以下製程的高良率設計上,提供綜合 DFM 解決方案的領導能力。” |
About Synopsys DFM |
Synopsys offers the industry's most comprehensive RTL-to-Mask DFM solution. Its DFM product family addresses critical yield and manufacturability issues with its ProteusR® mask synthesis, Synopsys PSM, CATS™ mask data preparation, SiVL® lithography verification, iVirtual StepperTM mask defect dispositioning and Taurus™ TCAD software products. Synopsys leverages this expertise through its industry-leading Galaxy™ design platform implementation solution in order to help ensure that designs at 90nm and smaller geometries will meet key manufacturing requirements. Synopsys' DFM product family is the solution-of-choice for 130-nm yield -sensitive, high-value chips, worldwide. Eighty percent of all sub-180-nm microprocessors, 50 percent of all sub-180-nm DRAMs, 80 percent of all sub-180-nm FPGA and graphics chips, and 75 percent of all sub-180-nm cellular baseband chips produced use Proteus, and more than 80 percent of all photomasks produced use CATS. |
About Synopsys |
Synopsys, Inc. (Nasdaq:SNPS) is the world leader in electronic design automation (EDA) software for semiconductor design. The company delivers technology-leading semiconductor design and verification platforms and IC manufacturing software products to the global electronics market, enabling the development and production of complex systems- on -chips (SoCs). Synopsys also provides intellectual property and design services to simplify the design process and accelerate time-to-market for its customers. Synopsys is headquartered in Mountain View, California and has offices in more than 60 locations throughout North America, Europe, Japan and Asia. Visit Synopsys online at http://www.synopsys.com/. |
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