MEMS
- Introduction
- Differentiation
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MEMS (Micro-Electro-Mechanical Systems)
UMC's 8" manufacturing capability & strong technical support has resulted in significant MEMS product sucesses including microphone, inertial sensors, pressure sensors and environmental sensors (temperature/humidity sensors, gas sensors) for UMC customers, with more than hundreds of thousands of wafers shipped already.
Based on current and upcoming MEMS market requirements, UMC has established a series of fundamental MEMS process building blocks such as Si/SiO2 DRIE, Si/SiO2 release, stress controllable SiN/Poly-Si, wafer thinning, ion beam etch, double side aligner, and many others to help customers construct MEMS structures in a CMOS foundry fab. Many customers have benefited from these solutions to introduce a variety of MEMS devices to market.
In addition, to further drive this sizeable market, UMC is extending its collaboration with industrial partners via robust business models. By maintaining investment in competitive processes, UMC and its upstream and downstream partners can establish a MEMS ecosystem to incubate new applications in the evolving MEMS sensor market. With more and more emerging MEMS applications on the horizon, UMC is well positioned to face this new trend by accelerating the learning cycle from design to silicon success in the coming years.
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UMC is well experienced in MEMS devices such as Microphones, Inertial sensors, Pressure sensors, Environmental sensors (temperature/humidity sensors, Gas sensors, etc.)
